- SMIF enclosure
- (шлюзова) камера стандартного механічного інтерфейсу
English-Ukrainian dictionary of microelectronics. 2013.
English-Ukrainian dictionary of microelectronics. 2013.
FOUP — is an acronym for Front Opening Unified Pod.It is a specialised plastic enclosure designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be removed for processing or measurement by tools… … Wikipedia